https://theamberpost.com/feed/tag/zero%20defect%20tools%20semiconductor2023-05-09T11:09:27+00:00https://theamberpost.com/112901
The Challenge of EUV Stochastic Defects
One of the biggest challenges facing chipmakers today is the need to identify defects and ramp manufacturing yield faster than ever before. This is particularly important in the case of extreme ultraviolet (EUV) lithography, which is used to create the smallest features on modern computer chips. EUV lithography allows for the creation of patterns with feature sizes as small as 7nm, but it also introduces new types of defects that must be managed.
One such defect is the EUV stochastic defect, which is a non-repeating patterning defect that can occur at random locations on a chip. These defects can ta...]]>
2023-05-09T11:09:27+00:00